10/4/2010	8:36:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/4/2010	8:36:28 PM	Recipe started at 8:36 PM
10/4/2010	8:36:28 PM	H2 valve closed
10/4/2010	8:36:28 PM	BCl3 valve closed
10/4/2010	8:36:28 PM	PH3 valve closed
10/4/2010	8:36:28 PM	SiCl4 pre valve closed
10/4/2010	8:36:28 PM	SiCl4 post valve closed
10/4/2010	8:36:28 PM	Main Vac valve closed
10/4/2010	8:36:28 PM	Bypass valve closed
10/4/2010	8:36:28 PM	Bubbler valve closed
10/4/2010	8:36:28 PM	Helium valve opened
10/4/2010	8:36:28 PM	Helium MFC set to  500.000000
10/4/2010	8:36:28 PM	H2 MFC set to  0.000000
10/4/2010	8:36:28 PM	BCl3 MFC set to  0.000000
10/4/2010	8:36:28 PM	PHl3 MFC set to  0.000000
10/4/2010	8:36:28 PM	SiCl4 MFC set to  0.000000
10/4/2010	8:36:28 PM	Bypass solenoid MFC set to  0.000000
10/4/2010	8:36:28 PM	Tube furnace set to 0
10/4/2010	8:37:48 PM	Helium valve closed
10/4/2010	8:37:48 PM	H2 valve closed
10/4/2010	8:37:48 PM	BCl3 valve closed
10/4/2010	8:37:48 PM	PH3 valve closed
10/4/2010	8:37:48 PM	SiCl4 pre valve closed
10/4/2010	8:37:48 PM	SiCl4 post valve closed
10/4/2010	8:37:48 PM	Main Vac valve closed
10/4/2010	8:37:48 PM	Bypass valve closed
10/4/2010	8:37:48 PM	Bubbler valve closed
10/4/2010	8:37:48 PM	Helium MFC set to  0.000000
10/4/2010	8:37:48 PM	H2 MFC set to  0.000000
10/4/2010	8:37:48 PM	BCl3 MFC set to  0.000000
10/4/2010	8:37:48 PM	PHl3 MFC set to  0.000000
10/4/2010	8:37:48 PM	SiCl4 MFC set to  0.000000
10/4/2010	8:37:48 PM	Bypass solenoid MFC set to  0.000000
10/4/2010	8:37:49 PM	Tube furnace set to 0
10/4/2010	8:37:49 PM	Run finished at 8:37 PM
10/4/2010	8:37:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/4/2010	8:45:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/4/2010	8:45:10 PM	Recipe started at 8:45 PM
10/4/2010	8:45:10 PM	Helium valve closed
10/4/2010	8:45:10 PM	H2 valve closed
10/4/2010	8:45:10 PM	BCl3 valve closed
10/4/2010	8:45:10 PM	PH3 valve closed
10/4/2010	8:45:10 PM	SiCl4 pre valve closed
10/4/2010	8:45:10 PM	SiCl4 post valve closed
10/4/2010	8:45:10 PM	Main Vac valve closed
10/4/2010	8:45:10 PM	Bubbler valve closed
10/4/2010	8:45:10 PM	Bypass valve opened
10/4/2010	8:45:10 PM	Helium MFC set to  0.000000
10/4/2010	8:45:10 PM	H2 MFC set to  0.000000
10/4/2010	8:45:10 PM	BCl3 MFC set to  0.000000
10/4/2010	8:45:10 PM	PHl3 MFC set to  0.000000
10/4/2010	8:45:10 PM	SiCl4 MFC set to  0.000000
10/4/2010	8:45:10 PM	Bypass solenoid MFC set to  0.000000
10/4/2010	8:45:11 PM	Tube furnace set to 0
10/4/2010	8:45:35 PM	Run aborted at 8:45 PM
10/4/2010	8:45:35 PM	Helium valve closed
10/4/2010	8:45:35 PM	H2 valve closed
10/4/2010	8:45:35 PM	BCl3 valve closed
10/4/2010	8:45:35 PM	PH3 valve closed
10/4/2010	8:45:35 PM	SiCl4 pre valve closed
10/4/2010	8:45:35 PM	SiCl4 post valve closed
10/4/2010	8:45:35 PM	Bypass valve closed
10/4/2010	8:45:35 PM	Main Vac valve closed
10/4/2010	8:45:35 PM	Bubbler valve closed
10/4/2010	8:45:35 PM	Helium MFC set to  0.000000
10/4/2010	8:45:35 PM	H2 MFC set to  0.000000
10/4/2010	8:45:35 PM	BCl3 MFC set to  0.000000
10/4/2010	8:45:35 PM	PHl3 MFC set to  0.000000
10/4/2010	8:45:35 PM	SiCl4 MFC set to  0.000000
10/4/2010	8:45:35 PM	Tube furnace set to 0
10/4/2010	8:45:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/4/2010	8:49:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/4/2010	8:49:36 PM	Recipe started at 8:49 PM
10/4/2010	8:49:36 PM	Helium valve closed
10/4/2010	8:49:36 PM	H2 valve closed
10/4/2010	8:49:36 PM	BCl3 valve closed
10/4/2010	8:49:36 PM	PH3 valve closed
10/4/2010	8:49:36 PM	SiCl4 pre valve closed
10/4/2010	8:49:36 PM	SiCl4 post valve closed
10/4/2010	8:49:36 PM	Main Vac valve closed
10/4/2010	8:49:36 PM	Bubbler valve closed
10/4/2010	8:49:36 PM	Bypass valve opened
10/4/2010	8:49:36 PM	Helium MFC set to  0.000000
10/4/2010	8:49:36 PM	H2 MFC set to  0.000000
10/4/2010	8:49:36 PM	BCl3 MFC set to  0.000000
10/4/2010	8:49:36 PM	PHl3 MFC set to  0.000000
10/4/2010	8:49:36 PM	SiCl4 MFC set to  0.000000
10/4/2010	8:49:36 PM	Bypass solenoid MFC set to  0.000000
10/4/2010	8:49:36 PM	Tube furnace set to 0
10/4/2010	8:50:30 PM	Helium valve closed
10/4/2010	8:50:30 PM	H2 valve closed
10/4/2010	8:50:30 PM	BCl3 valve closed
10/4/2010	8:50:30 PM	PH3 valve closed
10/4/2010	8:50:30 PM	SiCl4 pre valve closed
10/4/2010	8:50:30 PM	SiCl4 post valve closed
10/4/2010	8:50:30 PM	Bubbler valve closed
10/4/2010	8:50:30 PM	Main Vac valve opened
10/4/2010	8:50:30 PM	Bypass valve opened
10/4/2010	8:50:30 PM	Helium MFC set to  0.000000
10/4/2010	8:50:30 PM	H2 MFC set to  0.000000
10/4/2010	8:50:30 PM	BCl3 MFC set to  0.000000
10/4/2010	8:50:30 PM	PHl3 MFC set to  0.000000
10/4/2010	8:50:30 PM	SiCl4 MFC set to  0.000000
10/4/2010	8:50:30 PM	Bypass solenoid MFC set to  0.000000
10/4/2010	8:50:31 PM	Tube furnace set to 0
10/4/2010	8:50:31 PM	Run finished at 8:50 PM
10/4/2010	8:50:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/4/2010	8:51:45 PM	Tube furnace set to 100
10/4/2010	9:38:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/4/2010	9:38:40 PM	Recipe started at 9:38 PM
10/4/2010	9:38:40 PM	H2 valve closed
10/4/2010	9:38:40 PM	BCl3 valve closed
10/4/2010	9:38:40 PM	PH3 valve closed
10/4/2010	9:38:40 PM	SiCl4 pre valve closed
10/4/2010	9:38:40 PM	SiCl4 post valve closed
10/4/2010	9:38:40 PM	Main Vac valve closed
10/4/2010	9:38:40 PM	Bypass valve closed
10/4/2010	9:38:40 PM	Bubbler valve closed
10/4/2010	9:38:40 PM	Helium valve opened
10/4/2010	9:38:40 PM	Helium MFC set to  500.000000
10/4/2010	9:38:40 PM	H2 MFC set to  0.000000
10/4/2010	9:38:40 PM	BCl3 MFC set to  0.000000
10/4/2010	9:38:40 PM	PHl3 MFC set to  0.000000
10/4/2010	9:38:40 PM	SiCl4 MFC set to  0.000000
10/4/2010	9:38:40 PM	Bypass solenoid MFC set to  0.000000
10/4/2010	9:38:40 PM	Tube furnace set to 0
10/4/2010	9:40:00 PM	Helium valve closed
10/4/2010	9:40:00 PM	H2 valve closed
10/4/2010	9:40:00 PM	BCl3 valve closed
10/4/2010	9:40:00 PM	PH3 valve closed
10/4/2010	9:40:00 PM	SiCl4 pre valve closed
10/4/2010	9:40:00 PM	SiCl4 post valve closed
10/4/2010	9:40:00 PM	Main Vac valve closed
10/4/2010	9:40:00 PM	Bypass valve closed
10/4/2010	9:40:00 PM	Bubbler valve closed
10/4/2010	9:40:00 PM	Helium MFC set to  0.000000
10/4/2010	9:40:00 PM	H2 MFC set to  0.000000
10/4/2010	9:40:00 PM	BCl3 MFC set to  0.000000
10/4/2010	9:40:00 PM	PHl3 MFC set to  0.000000
10/4/2010	9:40:00 PM	SiCl4 MFC set to  0.000000
10/4/2010	9:40:00 PM	Bypass solenoid MFC set to  0.000000
10/4/2010	9:40:00 PM	Tube furnace set to 0
10/4/2010	9:40:00 PM	Run finished at 9:40 PM
10/4/2010	9:40:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/4/2010	9:42:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/4/2010	9:42:16 PM	Recipe started at 9:42 PM
10/4/2010	9:42:16 PM	Helium valve closed
10/4/2010	9:42:16 PM	H2 valve closed
10/4/2010	9:42:16 PM	BCl3 valve closed
10/4/2010	9:42:16 PM	PH3 valve closed
10/4/2010	9:42:16 PM	SiCl4 pre valve closed
10/4/2010	9:42:16 PM	SiCl4 post valve closed
10/4/2010	9:42:16 PM	Main Vac valve closed
10/4/2010	9:42:16 PM	Bubbler valve closed
10/4/2010	9:42:16 PM	Bypass valve opened
10/4/2010	9:42:16 PM	Helium MFC set to  0.000000
10/4/2010	9:42:16 PM	H2 MFC set to  0.000000
10/4/2010	9:42:16 PM	BCl3 MFC set to  0.000000
10/4/2010	9:42:16 PM	PHl3 MFC set to  0.000000
10/4/2010	9:42:16 PM	SiCl4 MFC set to  0.000000
10/4/2010	9:42:16 PM	Bypass solenoid MFC set to  0.000000
10/4/2010	9:42:16 PM	Tube furnace set to 0
10/4/2010	9:43:02 PM	Helium valve closed
10/4/2010	9:43:02 PM	H2 valve closed
10/4/2010	9:43:02 PM	BCl3 valve closed
10/4/2010	9:43:02 PM	PH3 valve closed
10/4/2010	9:43:02 PM	SiCl4 pre valve closed
10/4/2010	9:43:02 PM	SiCl4 post valve closed
10/4/2010	9:43:02 PM	Bubbler valve closed
10/4/2010	9:43:02 PM	Main Vac valve opened
10/4/2010	9:43:02 PM	Bypass valve opened
10/4/2010	9:43:02 PM	Helium MFC set to  0.000000
10/4/2010	9:43:02 PM	H2 MFC set to  0.000000
10/4/2010	9:43:02 PM	BCl3 MFC set to  0.000000
10/4/2010	9:43:02 PM	PHl3 MFC set to  0.000000
10/4/2010	9:43:02 PM	SiCl4 MFC set to  0.000000
10/4/2010	9:43:02 PM	Bypass solenoid MFC set to  0.000000
10/4/2010	9:43:02 PM	Tube furnace set to 0
10/4/2010	9:43:02 PM	Run finished at 9:43 PM
10/4/2010	9:43:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/4/2010	9:43:09 PM	Helium MFC set to  50.000000
10/4/2010	9:43:10 PM	Helium valve opened
10/4/2010	9:53:32 PM	Helium valve closed
10/4/2010	10:00:03 PM	Helium valve opened
10/4/2010	10:50:51 PM	Helium valve closed
10/4/2010	11:25:17 PM	Recipe started at 11:25 PM
10/4/2010	11:25:17 PM	Helium valve closed
10/4/2010	11:25:17 PM	BCl3 valve closed
10/4/2010	11:25:17 PM	PH3 valve closed
10/4/2010	11:25:17 PM	SiCl4 pre valve closed
10/4/2010	11:25:17 PM	SiCl4 post valve closed
10/4/2010	11:25:17 PM	Main Vac valve closed
10/4/2010	11:25:17 PM	Bypass valve closed
10/4/2010	11:25:17 PM	Bubbler valve closed
10/4/2010	11:25:17 PM	H2 valve opened
10/4/2010	11:25:17 PM	Helium MFC set to  0.000000
10/4/2010	11:25:17 PM	H2 MFC set to  500.000000
10/4/2010	11:25:17 PM	BCl3 MFC set to  0.000000
10/4/2010	11:25:17 PM	PHl3 MFC set to  0.000000
10/4/2010	11:25:17 PM	SiCl4 MFC set to  0.000000
10/4/2010	11:25:17 PM	Bypass solenoid MFC set to  0.000000
10/4/2010	11:25:17 PM	Tube furnace set to 1000
10/4/2010	11:26:39 PM	Helium valve closed
10/4/2010	11:26:39 PM	BCl3 valve closed
10/4/2010	11:26:39 PM	PH3 valve closed
10/4/2010	11:26:39 PM	SiCl4 pre valve closed
10/4/2010	11:26:39 PM	SiCl4 post valve closed
10/4/2010	11:26:39 PM	Main Vac valve closed
10/4/2010	11:26:39 PM	Bypass valve closed
10/4/2010	11:26:39 PM	H2 valve opened
10/4/2010	11:26:39 PM	Bubbler valve opened
10/4/2010	11:26:39 PM	Helium MFC set to  0.000000
10/4/2010	11:26:39 PM	H2 MFC set to  500.000000
10/4/2010	11:26:39 PM	BCl3 MFC set to  0.000000
10/4/2010	11:26:39 PM	PHl3 MFC set to  0.000000
10/4/2010	11:26:39 PM	SiCl4 MFC set to  0.000000
10/4/2010	11:26:39 PM	Bypass solenoid MFC set to  0.000000
10/4/2010	11:26:39 PM	Tube furnace set to 1000
10/4/2010	11:46:39 PM	Helium valve closed
10/4/2010	11:46:39 PM	BCl3 valve closed
10/4/2010	11:46:39 PM	PH3 valve closed
10/4/2010	11:46:39 PM	Main Vac valve closed
10/4/2010	11:46:39 PM	Bypass valve closed
10/4/2010	11:46:39 PM	H2 valve opened
10/4/2010	11:46:39 PM	SiCl4 pre valve opened
10/4/2010	11:46:39 PM	SiCl4 post valve opened
10/4/2010	11:46:39 PM	Bubbler valve opened
10/4/2010	11:46:39 PM	Helium MFC set to  0.000000
10/4/2010	11:46:39 PM	H2 MFC set to  500.000000
10/4/2010	11:46:39 PM	BCl3 MFC set to  0.000000
10/4/2010	11:46:39 PM	PHl3 MFC set to  0.000000
10/4/2010	11:46:39 PM	SiCl4 MFC set to  50.000000
10/4/2010	11:46:39 PM	Bypass solenoid MFC set to  0.000000
10/4/2010	11:46:39 PM	Tube furnace set to 1000
